Phoenix 350 Lite Thermal Comperssion Bonder

    Product features

  • Phoenix 350 Lite Thermal Comperssion Bonder

    High Precision: ±0.5μm @3σ; Angle ±0.01° @3σ;  

    High Speed: Placement cycle <10s;  

    Supports 6pcs 6" or 3pcs 8" wafer rings (wafer, waffle pack, gel-pak);  

    Supports a wide range of chip sizes, multi-chip placement capability, large placement area;  

    Bonding head heating function: 450℃ ±2.5℃;  Substrate heating function: 350℃ ±3.5℃;  

    Supports ultra-low bond force, wide controllable bond force range;  

    Support for Die face up/face down bonding; 

    Repeatable sub-micron placement accuracy;  

    Supports multiple bonding methods (adhesive bonding, TC bonding, ultrasonic bonding);  

    Compatible with nitrogen, formic acid, nitrogen-hydrogen mixed atmosphere, strong process scalability for fluxless applications;  

    Excellent airtightness and extremely low gas consumption;  

    Ultra-high-definition PLXvision™ alignment system;  Auto IQC system, SECS/GEM(MES) supported.


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