Product features
High Precision: ±0.5μm @3σ; Angle ±0.01° @3σ;
Supports 6pcs 6" or 3pcs 8" wafer rings (wafer, waffle pack, gel-pak);
Automatic nozzle changer, Equipped with double ejector tools;
Bonding head heating function: 450℃ ±2.5℃; Substrate heating function: 350℃ ±3.5℃;
Highly stable force control system, supporting ultra-low placement force, wide controllable range of placement force, programmable force adjustment, range 10g-10kg (depending on configuration), force control accuracy 2%;
Support for Die face up/face down bonding;
Supports multiple bonding methods (adhesive bonding, TC bonding, ultrasonic bonding);
Compatible with nitrogen, formic acid, nitrogen-hydrogen mixed atmosphere, supports NCF/NCP/TCCUF, and also enables fluxless processes for higher yield;
Ultra-high-definition PLXvision™ alignment system; Auto IQC system, SECS/GEM(MES) supported;
Highly automated, supports manual and fully automatic loading/unloading conveyor systems.
