Product features
High Precision: X/Y placement accuracy: ±3μm@3σ;
Theta placement accuracy: <0.1°@3σ;
High speed: COC placement cycle time ≤10s (Excluding temperature curve);
Supporting the placement of multiple wafers and AB Die of different sizes;
Automatic nozzle changer;
High automation, automatic loading and unloading transmission system, automatic glass sheet cyclic pick-and-place test function (BMC), etc.;
Auto IQC system, SECS/GEM supported.
